CVDおよびスパッタリング法による酸化タンタル薄膜の性質

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5 February 1985

journal article
Published by The Electrochemical Society of Japan in Denki Kagaku oyobi Kogyo Butsuri Kagaku

Vol. 53 (2), 109-113
https://doi.org/10.5796/kogyobutsurikagaku.53.109

Abstract

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Cited by 5 articles