A theoretical analysis of the electret air-gap field-effect structure for sensor applications
- 1 February 1986
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 9 (1), 59-72
- https://doi.org/10.1016/0250-6874(86)80007-5
Abstract
No abstract availableKeywords
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- Properties of a movable-gate–field-effect structure as an electromechanical sensorThe Journal of the Acoustical Society of America, 1978