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Etch process characterization using neural network methodology: a case study
Home
Publications
Etch process characterization using neural network methodology: a case study
Etch process characterization using neural network methodology: a case study
MM
Michael T. Mocella
Michael T. Mocella
JB
James A. Bondur
James A. Bondur
TT
Terry R. Turner
Terry R. Turner
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1 January 1992
proceedings article
Published by
SPIE-Intl Soc Optical Eng
p.
232-242
https://doi.org/10.1117/12.56637
Abstract
No abstract available
Keywords
ETCHING
NEURAL NETWORKS
Cited by 27 articles