Correlation between silicon hydride species and the photoluminescence intensity of porous silicon

Abstract

The role of silicon hydride species in the photoluminescence intensity behavior of porous Si has been studied. The surfaces of luminescent porous Si samples were converted to a predominate SiH termination using a remote H plasma. The as‐passivated samples were then immersed in various concentrations of hydrofluouric solutions to regulate the recovery of SiH₂ termination on the surface. Photoluminescence measurements and transmission Fourier‐transform infrared spectroscopy have shown that predominant silicon monohydride (SiH) termination results in weak photoluminescence. In contrast, it has been observed that the appearance of silicon dihydride (SiH₂) coincides with an increase in the photoluminescence intensity.