Stress relaxation during annealing of boron nitride films
- 1 June 2001
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 389 (1-2), 173-179
- https://doi.org/10.1016/s0040-6090(01)00899-9
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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