Low Energy Selfsputtering Yields of Molybdenum and Tungsten

Abstract

Selfsputtering yields of molybdenum and tungsten have been measured by the weight change method in the energy range between 0.1 keV and 10 keV at normal incidence. Measured yields are compared with two different universal empirical formulae proposed to predict the energy dependence of the sputtering yield and it is found that measured yields agree with the predicted ones from these two formulae within a factor of three for both molybdenum and tungsten. The results are discussed in view of their importance to the plasma-wall interaction in fusion devices.