Deep-ultraviolet spatial-period division using an excimer laser
- 1 September 1982
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 7 (9), 402-404
- https://doi.org/10.1364/ol.7.000402
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 3 references indexed in Scilit:
- Gold transmission gratings with submicrometer periods and thicknesses ≳0.5 μmJournal of Vacuum Science and Technology, 1981
- Spatial period division—A new technique for exposing submicrometer-linewidth periodic and quasiperiodic patternsJournal of Vacuum Science and Technology, 1979
- Color pictures using the zero diffraction order of phase grating structuresOptics Communications, 1976