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Kinetics of the Thermal Oxidation of Silicon in O 2 / HCl Mixtures
Home
Publications
Kinetics of the Thermal Oxidation of Silicon in O 2 / HCl Mixtures
Kinetics of the Thermal Oxidation of Silicon in O 2 / HCl Mixtures
DH
D. W. Hess
D. W. Hess
BD
B. E. Deal
B. E. Deal
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1 May 1977
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 124
(5)
,
735-739
https://doi.org/10.1149/1.2133396
Abstract
No abstract available
Cited by 73 articles