In situ ion etching in a scanning electron microscope
- 1 June 1977
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 12 (6), 1225-1232
- https://doi.org/10.1007/bf02426861
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Ion−beam etchingJournal of Vacuum Science and Technology, 1975
- A saddle field ion source of spherical configuration for etching and thinning applicationsVacuum, 1974
- Scanning Electron Microscopic Observation of Metal Surfaces Eroded by Argon IonsJapanese Journal of Applied Physics, 1974
- New Developments in Ion Beam Sputtering and Etching TechniquesJapanese Journal of Applied Physics, 1974
- Ion beam etchingPhysics in Technology, 1974
- Modes of operation of an electrostatic ion gunJournal of Physics D: Applied Physics, 1973
- The effect of radio‐frequency sputter ion etching and ion‐beam etching on biological material: a scanning electron microscope studyJournal of Microscopy, 1972
- A new type of ion sourceJournal of Physics D: Applied Physics, 1970
- A Charged Particle OscillatorNature, 1966
- ?Neue Untersuchungen ber die Kathodenzerst ubung der Glimmentladung.?The European Physical Journal A, 1942