Study of the Rayleigh acoustic mode in a-Si:H/a-SiNx:H superlattices
- 1 January 1994
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 75 (1), 475-477
- https://doi.org/10.1063/1.355823
Abstract
The Brillouin light‐scattering technique has been exploited for studying the Rayleigh acoustic mode in superlattice films consisting of alternate layers of a‐Si:H and a‐SiNx:H. The phase velocity of the Rayleigh mode has been measured on superlattices with different thicknesses of the a‐Si:H layer. The results obtained have been interpreted in terms of the effective medium model within the elastic continuum approximation; no anomalous behavior is observed, in contrast with previous ultrasonic measurements in superlattice with a minor nitrogen content.Keywords
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