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Abstract: Sputtering of multicomponent metal and semiconductor targets
Home
Publications
Abstract: Sputtering of multicomponent metal and semiconductor targets
Abstract: Sputtering of multicomponent metal and semiconductor targets
HA
Hans Henrik Andersen
Hans Henrik Andersen
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1 March 1979
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 16
(2)
,
770-771
https://doi.org/10.1116/1.570081
Abstract
No abstract available
Keywords
MULTICOMPONENT METAL
SEMICONDUCTOR TARGETS
ABSTRACT
SPUTTERING OF MULTICOMPONENT
METAL AND SEMICONDUCTOR
Cited by 27 articles