Technology transfer in the development of a nano-topographic instrument

Abstract

A surface-texture and profiling instrument for sub-nanometre surface measurement based on the NPL Nanosurf 2 is described. It has a horizontal dynamic traverse range of 50 nm to 50 mm, which is achieved by the use of an ultraprecise slideway having low environmental susceptibility. Ergonomic and functional design differences, and the reasons for these, are discussed, together with the results so far obtained from the first instrument, called Nanostep.