Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
- 30 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3), 477-481
- https://doi.org/10.1016/s0924-4247(97)80007-6
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Scanning force microscope using a piezoelectric microcantileverJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Development of a force sensor for atomic force microscopy using piezoelectric thin filmsNanotechnology, 1993
- Atomic resolution with an atomic force microscope using piezoresistive detectionApplied Physics Letters, 1993
- Atomic force microscopy using ZnO whisker tipReview of Scientific Instruments, 1992