Fabrication of thickness-controlled silicon nanowires and their characteristics

Publisher Website

1 November 1995

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Vol. 13 (6), 2166-2169
https://doi.org/10.1116/1.588097

Abstract

No abstract available

Keywords

NANOWIRES

Cited by 36 articles