Evaluation of Derivatives of Reflectance and Transmittance by Stratified Structures and Solution of the Reverse Problem of Ellipsometry

Abstract

Methods are developed for the evaluation of the derivatives of amplitude reflectance and transmittance with respect to the parameters of stratified structures. They are based on simple relations of the derivatives with the auxiliary quantities needed in the computation of reflectance and transmittance. The solution of the reverse ellipsometric problem is discussed as an application.