Effect of layer size on lattice distortion in strained-layer superlattices
- 15 June 1984
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 44 (12), 1158-1160
- https://doi.org/10.1063/1.94676
Abstract
The accommodation of lattice mismatch in strained‐layer GaAs‐InxGa1−xAs (x≊0.27) superlattices grown by metalorganic chemical vapor deposition has been examined as a function of layer thickness using transmission electron microscopy. The degree of distortion from cubic is shown to be dependent on the layer thickness and at sufficiently large layer sizes (≳180 Å) dislocations are introduced at the interfaces.Keywords
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