Laser annealing of low dose Se-implanted GaAs studied by d.l.t.s.

Abstract
Deep level transient spectroscopy (d.l.t.s.) has been applied to the study of deep levels in GaAs following post-implantation annealing using a Q-switched ruby laser. High concentrations (> 1015 cm−3) of deep trapping levels are observed in the laser melt region using a forward-bias voltage pulse.