Sputtering of low-Z materials
- 30 April 1991
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 179-181, 34-36
- https://doi.org/10.1016/0022-3115(91)90010-5
Abstract
No abstract availableKeywords
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- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969