Check on the linearity of a capacitance diaphragm manometer between 10−4 and 10−1 Torr
- 1 September 1976
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (9), 1214-1215
- https://doi.org/10.1063/1.1134803
Abstract
A procedure is outlined whereby the pressure measurement linearity of a certain class of capacitance diaphragm manometers can be evaluated. Data are presented to illustrate the technique as applied to the 10−4–10−1 Torr pressure range.Keywords
This publication has 1 reference indexed in Scilit:
- Definitive pressure generation in the 10−4–10−3 Torr range for atomic scattering experimentsJournal of Vacuum Science and Technology, 1976