Integrated circuits as viewed with an acoustic microscope
- 1 September 1974
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 25 (5), 251-253
- https://doi.org/10.1063/1.1655459
Abstract
The images of a high‐frequency bipolar transistor obtained with an acoustic microscope are compared with those of a differential interference optical microscope and a scanning electron microscope in order to illustrate that the acoustic microscope can be used in a reflection‐type mode to obtain quality pictures of a surface containing integrated circuits. The frequency of the acoustic beam is 600 MHz and the resolution is near 2 μ.Keywords
This publication has 2 references indexed in Scilit:
- Acoustic microscope—scanning versionApplied Physics Letters, 1974
- Recent developments in digital image processing at the image processing laboratory at the jet propulsion laboratoryProceedings of the IEEE, 1972