Influence of device geometry on conductance DLTS spectra of GaAs MESFETs

Abstract
The observation of hole traps in small-signal GaAs MESFETs has been extensively reported in the literature and has been atributed to trapping at the active layer/substrate interface. Evidence is presented here to suggest that the main contribution to the ‘hole trap-like’ spectrum in conductance DLTS is the modulation of the surface depletion layer in the ungated access regions of the device.