rf microelectromechanical system device with a lateral field-emission detector
- 1 March 2006
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 24 (2), 927-931
- https://doi.org/10.1116/1.2177231
Abstract
We propose a micromachined device that utilizes the field-emission (FE) phenomenon as a mean to modulate signal for radio-frequency microelectromechanical system applications. In this article, we present the stationary reference (SR) device and the resonator-embedded (RE) device and compare their field-emission performances. The SR device contains no moving part and is used to examine the conditions to excite field emission. The RE device has an embedded microresonator of bandpass filter characteristic. Due to enhanced tip sharpness and closer gap, initial results show that compared to the SR device, the FE current of the RE device has been increased by 192 times under the same anode-cathode potential difference of 240 V and 2 × 10 − 8 Torr vacuum level.Keywords
This publication has 6 references indexed in Scilit:
- Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using LabwareJapanese Journal of Applied Physics, 2003
- Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon ChipJapanese Journal of Applied Physics, 1999
- Recent progress in field emitter array development for high performance applicationsMaterials Science and Engineering: R: Reports, 1999
- High-order medium frequency micromechanical electronic filtersJournal of Microelectromechanical Systems, 1999
- Microelectromechanical filters for signal processingJournal of Microelectromechanical Systems, 1998
- Electron emission in intense electric fieldsProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1928