Structure characterization of CVD amorphous Si3N4 by pulsed neutron total scattering
- 1 December 1979
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 34 (3), 313-321
- https://doi.org/10.1016/0022-3093(79)90018-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- An X-ray diffraction study of the amorphous structure of chemically vapor-deposited silicon nitrideJournal of Non-Crystalline Solids, 1979
- Time-of-flight pulsed neutron diffraction of liquids using an electron linacNuclear Instruments and Methods, 1977
- Chemical vapour-deposited silicon nitrideJournal of Materials Science, 1977