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Chlorine surface interaction and laser-induced surface etching reactions
Home
Publications
Chlorine surface interaction and laser-induced surface etching reactions
Chlorine surface interaction and laser-induced surface etching reactions
WS
W. Sesselmann
W. Sesselmann
TC
T. J. Chuang
T. J. Chuang
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1 September 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 3
(5)
,
1507-1512
https://doi.org/10.1116/1.582975
Abstract
No abstract available
Cited by 56 articles