30.4: Short‐Channel Effect of Sub‐Micron Poly‐Si TFTs with Large Poly‐Si Grains
- 1 May 1998
- journal article
- Published by Wiley in SID Symposium Digest of Technical Papers
- Vol. 29 (1), 891-894
- https://doi.org/10.1889/1.1833907
Abstract
No abstract availableKeywords
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- Polysilicon thin-film transistors with channel length and width comparable to or smaller than the grain size of the thin filmIEEE Transactions on Electron Devices, 1991
- Characteristics and three-dimensional integration of MOSFET's in small-grain LPCVD polycrystalline SiliconIEEE Transactions on Electron Devices, 1985