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A large area deflection system with very low aberration
Home
Publications
A large area deflection system with very low aberration
A large area deflection system with very low aberration
HK
H. P. Kuo
H. P. Kuo
TG
T. R. Groves
T. R. Groves
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1 October 1983
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 1
(4)
,
1316-1321
https://doi.org/10.1116/1.582737
Abstract
No abstract available
Cited by 5 articles