Improvement of Depth Resolution in Sputter Profiling by Cooling Specimens
- 1 August 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (8A), L547
- https://doi.org/10.1143/jjap.22.l547
Abstract
A substantial improvement in the depth resolution of sputter-depth profiles obtained using Auger electron spectroscopy was attained by cooling specimens to nearly liquid-nitrogen temperature during the sputtering process. The effectiveness of this method is illustrated by comparing profiles obtained at different temperatures from the simultaneously prepared Ag/Cu multilayer thin film structures. It is presumed that the effects of the cooling are caused by the suppression of irradiation-induced diffusion and/or of annealing of the more or less amorphized surfaces.Keywords
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