The relationship between residual stress, X-ray elastic constants and lattice parameters in TiN films made by physical vapor deposition
- 1 March 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 170 (1), 63-70
- https://doi.org/10.1016/0040-6090(89)90622-6
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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