Secondary ion emission from polymer surfaces under Ar+, Xe+ and SF5+ ion bombardment
- 1 May 1998
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 133 (1-2), 47-57
- https://doi.org/10.1016/s0169-4332(97)00515-1
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Secondary ion mass spectroscopy resolution with ultra-low beam energiesJournal of Vacuum Science & Technology A, 1996
- Analysis of surface contaminants on gallium arsenide and silicon by high-resolution time-of-flight secondary ion mass spectrometryJournal of Vacuum Science & Technology B, 1989
- Comparison of polyatomic and atomic primary beams for secondary ion mass spectrometry of organicsAnalytical Chemistry, 1989