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A New Radio-Frequency Inductive Plasma Sputtering Process for Surface Coating
Home
Publications
A New Radio-Frequency Inductive Plasma Sputtering Process for Surface Coating
A New Radio-Frequency Inductive Plasma Sputtering Process for Surface Coating
PB
P. Beucherie
P. Beucherie
MB
M. Block
M. Block
JW
J. G. Wurm
J. G. Wurm
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1 January 1969
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 116
(1)
,
159
https://doi.org/10.1149/1.2411745
Abstract
No abstract available
Keywords
RADIO FREQUENCY
Cited by 4 articles