Residual Strains in Phosphorus-Diffused Silicon
- 1 February 1967
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 38 (2), 725-734
- https://doi.org/10.1063/1.1709402
Abstract
An x‐ray line‐broadening method is used to determine the residual strain level in a single‐crystal silicon slice diffused with high amounts of phosphorus (surface concentration >1021 atoms/cm3). The strain level was found to be higher than that from the Prussin model. This is shown to be due to insufficient penetration of the diffusion‐induced dislocations inside the diffused layers. Moreover, the strains along 〈220〉 directions were found to be considerably higher than those along other directions. This is interpreted as additional broadening along the Burgers vector direction.Keywords
This publication has 15 references indexed in Scilit:
- Diffusion-Induced Imperfections in SiliconJournal of the Electrochemical Society, 1965
- Formation and Composition of Surface Layers and Solubility Limits of Phosphorus During Diffusion in SiliconJournal of the Electrochemical Society, 1964
- Über die Röntgenstreuung an Kristallen mit Versetzungen III. Die asymptotische Darstellung von Debye‐Scherrer‐LinienprofilenPhysica Status Solidi (b), 1963
- On the analysis of dislocation networksPhilosophical Magazine, 1962
- Boron Induced Dislocations in SiliconJournal of Applied Physics, 1962
- Zur Röntgenstreuung an Kristallen mit Versetzungen I. Zylinderförmiger Kristall axialer SchraubenversetzungPhysica Status Solidi (b), 1962
- Über die Röntgenstreuung an Kristallen mit Versetzungen II. Berücksichtigung des nicht‐linearen Verschiebungsfeldes einer SchraubenversetzungPhysica Status Solidi (b), 1962
- X-ray studies of deformed metalsProgress in Metal Physics, 1959
- An optical method of studying the diffraction from imperfect crystals II. Crystals with dislocationsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1957
- A Numerical Fourier-analysis Method for the Correction of Widths and Shapes of Lines on X-ray Powder PhotographsProceedings of the Physical Society, 1948