Shallow implantation of Ti+ ions in sapphire [α-Al2O3(0001)]
- 1 August 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 157 (1-4), 226-232
- https://doi.org/10.1016/s0168-583x(99)00438-3
Abstract
No abstract availableKeywords
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