Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Plasma-assisted etching: Ion-assisted surface chemistry
Home
Publications
Plasma-assisted etching: Ion-assisted surface chemistry
Plasma-assisted etching: Ion-assisted surface chemistry
JC
J Coburn
J Coburn
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 May 1985
journal article
Published by
Elsevier
in
Applied Surface Science
Vol. 22-23
,
63-71
https://doi.org/10.1016/0169-4332(85)90037-6
Abstract
No abstract available
Keywords
REACTION RATE
SURFACE CHEMISTRY
Cited by 11 articles