Surface structure estimation by plasma fluorination of amorphous carbon, diamond, graphite and plastic film surfaces

Abstract

Various carbon films which have been produced in plasma have been fluorinated so that their surface structures could be analysed. Every fluorinated carbon film shows a characteristic contact angle change which follows its surface structure. These samples can be classified into two groups: amorphous and crystal, from comparison of the ratios of the area due to fluorine in the C_1s peak to the total area of the C_1s peak in ESCA results.