Metal-Organic Chemical Vapor Deposition of InSb on Gaas and InSb in an Inverted Stagnation Point Flow Geometry
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Photolytic Deposition of Insb FilmsMRS Proceedings, 1987
- The preparation of InSb and InAs1−x Sbx by metalorganic chemical vapor depositionJournal of Crystal Growth, 1986
- Thermal decomposition of metalorganic compounds used in the MOCVD of InPJournal of Crystal Growth, 1984