Contact Damage in Single‐Crystalline Silicon Investigated by Cross‐Sectional Transmission Electron Microscopy
- 1 August 1988
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 71 (8), 617-623
- https://doi.org/10.1111/j.1151-2916.1988.tb06378.x
Abstract
No abstract availableKeywords
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