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Annealing of Ion-Implanted Layers Under the Action of Laser Radiation
Home
Publications
Annealing of Ion-Implanted Layers Under the Action of Laser Radiation
Annealing of Ion-Implanted Layers Under the Action of Laser Radiation
MZ
M M Zaripov
M M Zaripov
IK
I B Khaybullin
I B Khaybullin
ES
E I Shtyrkov
E I Shtyrkov
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31 December 1976
journal article
Published by
IOP Publishing
in
Soviet Physics Uspekhi
Vol. 19
(12)
,
1032-1033
https://doi.org/10.1070/pu1976v019n12abeh005380
Abstract
No abstract available
Keywords
ION IMPLANTED
IMPLANTED LAYERS
LASER RADIATION
ANNEALING OF ION
ACTION
Cited by 17 articles