Measurements of the intrinsic stress in thin metal films
- 1 January 1990
- journal article
- Published by Elsevier BV in Vacuum
- Vol. 41 (4-6), 1279-1282
- https://doi.org/10.1016/0042-207x(90)93933-a
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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