Stresses in thin films: The relevance of grain boundaries and impurities
- 1 May 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 34 (2), 185-190
- https://doi.org/10.1016/0040-6090(76)90453-3
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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- Stress in films of silicon monoxideBritish Journal of Applied Physics, 1967