Ultrafast nanoscale metal-semiconductor-metal photodetectors on bulk and low-temperature grown GaAs
- 17 August 1992
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (7), 819-821
- https://doi.org/10.1063/1.107755
Abstract
Metal-semiconductor-metal photodetectors of finger spacing and width as small as 100 nm have been fabricated on bulk and low-temperature grown GaAs, and tested using a femtosecond pulse laser and high-speed electro-optic sampling. The fastest photodetectors have a measured full width at half maximum impulse response and a 3-dB bandwidth of 0.87 ps and 510 GHz, respectively, for low-temperature grown GaAs limited by carrier recombination time; and of 1.5 ps and 295 GHz for bulk GaAs, limited by the RC time constant. To our knowledge, they are the fastest detectors of their kinds reported to date.Keywords
This publication has 9 references indexed in Scilit:
- Tera-hertz GaAs metal-semiconductor-metal photodetectors with 25 nm finger spacing and finger widthApplied Physics Letters, 1992
- Ultrafast metal-semiconductor-metal photodiodes fabricated on low-temperature GaAsApplied Physics Letters, 1992
- Fabrication of sub-50 nm finger spacing and width high-speed metal–semiconductor–metal photodetectors using high-resolution electron beam lithography and molecular beam epitaxyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- 375-GHz-bandwidth photoconductive detectorApplied Physics Letters, 1991
- Picosecond characterization of bent coplanar waveguidesIEEE Microwave and Guided Wave Letters, 1991
- Subpicosecond characterization of carrier transport in GaAs-metal-semiconductor-metal photodiodesApplied Physics Letters, 1991
- Dynamic behavior of photocarriers in a GaAs metal-semiconductor-metal photodetector with sub-half-micron electrode patternApplied Physics Letters, 1989
- 105-GHz bandwidth metal-semiconductor-metal photodiodeIEEE Electron Device Letters, 1988
- Low dark current GaAs metal-semiconductor-metal (MSM) photodiodes using WSixcontactsIEEE Journal of Quantum Electronics, 1986