A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons
- 31 October 1997
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 44 (1-3), 483-487
- https://doi.org/10.1016/s0925-4005(97)00171-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Specific Problems of FEM Thermal Simulations for MicrosystemsComputers in Railways XIV, 1995
- Tin oxide micro gas sensor for detecting CH3SHSensors and Actuators B: Chemical, 1995
- Development of chemical sensors using microfabrication and micromachining techniquesSensors and Actuators B: Chemical, 1993
- Silicon Technologies for Sensor FabricationPublished by Elsevier ,1992