Ion bombardment of group IV elemental metal and synthetic nitride films
- 1 November 1979
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 63 (2), 289-297
- https://doi.org/10.1016/0040-6090(79)90029-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Properties and applications of ion-implanted filmsThin Solid Films, 1978
- The change in the structure of vacuum-condensed hexagonal close-packed metal films on ion bombardmentThin Solid Films, 1977
- Changes in the phase structure and formation of chemical compounds by ion implantation of tantalum thin filmsThin Solid Films, 1976