A simple two-axis ultraprecision actuator
- 1 April 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (4), 910-917
- https://doi.org/10.1063/1.1144920
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Performance Prediction and Loss Analysis of Low Specific Speed Submersible PumpsProceedings of the Institution of Mechanical Engineers, Part A: Journal of Power and Energy, 1990
- Sub-nanometre displacements calibration using X-ray interferometryMeasurement Science and Technology, 1990
- Design and assessment of monolithic high precision translation mechanismsJournal of Physics E: Scientific Instruments, 1987
- Translation stage for a scanning x-ray optical interferometerReview of Scientific Instruments, 1987
- AN X-RAY INTERFEROMETERApplied Physics Letters, 1965
- Some parasitic deflexions in parallel spring movementsJournal of Scientific Instruments, 1956
- Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused SilicaJournal of Applied Physics, 1953