Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements

Abstract

Recently precise positioning devices with low outgassing rates have been required for production systems of very large scale integrated circuits, surface analysis systems, and scanning tunneling microscopes in ultrahigh vacuum. A bakable X Yθ three‐axis positioning table using a unique positioning mechanism utilizing friction and inertial forces caused by rapid deformations of piezoelectric elements was developed. The table has a hexagonal shape of 120 mm in diameter and is mainly made of aluminum alloys with an E X‐process. The table has three feet with an Si3N4 ball on each bottom side and set on a plate made of Pyrex glass. The table was able to operate in an ultrahigh vacuum environment of the order of 10− 1 2 Torr.