TiN as a diffusion barrier in the Ti-Pt-Au beam-lead metal system
- 1 June 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 60 (2), 237-247
- https://doi.org/10.1016/0040-6090(79)90194-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Diffusion in Thin Film Ti–Au, Ti–Pd, and Ti–Pt CouplesJournal of Vacuum Science and Technology, 1972
- Beam-Lead TechnologyBell System Technical Journal, 1966
- Structure and Electrical Properties of Evaporated and Sputtered Titanium FilmsAnnalen der Physik, 1963