Reaction of Si(100) single crystals with nitrogen atoms
- 2 December 1982
- journal article
- Published by Elsevier in Surface Science
- Vol. 123 (2-3), 223-230
- https://doi.org/10.1016/0039-6028(82)90324-7
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Nitridation of Si(111) by nitrogen atoms. IISurface Science, 1982
- Nitridation of Si(111) by nitrogen atomsSurface Science, 1981
- Nitridation of silicon (111): Auger and LEED resultsJournal of Vacuum Science and Technology, 1980
- An electron diffraction study of the structure of silicon (100)Surface Science, 1978
- A study of the nitridation of silicon surfaces by low-energy electron diffraction and auger electron spectroscopySurface Science, 1973