Analysis of In0.07Ga0.93As layers on GaAs compliant substrates by double crystal x-ray diffraction

Abstract

Double crystal x-ray diffraction data is presented from the most extensive compliant substrate experiment to date. Five consecutive InGaAs–GaAs growths were performed simultaneously on GaAs-based thin film compliant substrates and thick reference substrates. The In 0.07 Ga 0.93 As layers were grown to thicknesses below and above the conventional critical thickness. It was found that InGaAs films grown on the compliant substrates have a larger critical thickness and slower strain relief than InGaAsgrown on conventional GaAs substrates.