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Diaphragm formation and pressure sensitivity in batch-fabricated silicon pressure sensors
Home
Publications
Diaphragm formation and pressure sensitivity in batch-fabricated silicon pressure sensors
Diaphragm formation and pressure sensitivity in batch-fabricated silicon pressure sensors
KW
K.D. Wise
K.D. Wise
SC
S.K. Clark
S.K. Clark
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1 January 1978
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
96-99
https://doi.org/10.1109/iedm.1978.189361
Abstract
No abstract available
Keywords
PRESSURE SENSITIVITY
SENSORS
BATCH
SILICON PRESSURE
FABRICATED SILICON
DIAPHRAGM FORMATION
FORMATION AND PRESSURE
Cited by 15 articles