Controlled placement of an individual carbon nanotube onto a microelectromechanical structure
- 2 April 2002
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 80 (14), 2574-2576
- https://doi.org/10.1063/1.1467701
Abstract
We report on the precise placement of a single carbon nanotube (CNT) onto a microlectromechanial system (MEMS) structure. Using a hybrid atomic force microscope/scanning electron microscope (AFM/SEM) system, an individual multiwalled CNT was retrieved from a cartridge by the AFM tip, translated to a MEMS device, and then placed across a gap between an actuating and a stationary structure. Progress toward a resistance versus stress/strain measurement on a CNT will be discussed, including SEM images of a MEMS structure we have designed specifically for such a measurement.Keywords
This publication has 18 references indexed in Scilit:
- Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical SpeciesScience, 2001
- Carbon Nanotube Single-Electron Transistors at Room TemperatureScience, 2001
- Measuring Motions of MEMSMRS Bulletin, 2001
- Strength and Breaking Mechanism of Multiwalled Carbon Nanotubes Under Tensile LoadScience, 2000
- Nanotube NanotweezersScience, 1999
- In situ resistance measurements of strained carbon nanotubesApplied Physics Letters, 1999
- Electrostatic Deflections and Electromechanical Resonances of Carbon NanotubesScience, 1999
- Large-scale synthesis of carbon nanotubesNature, 1992
- Continents ring the changesNature, 1992
- Helical microtubules of graphitic carbonNature, 1991