A micromachined RF microswitch applicable to phased-array antennas
- 20 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 4, 1923-1926 vol.4
- https://doi.org/10.1109/mwsym.1999.780350
Abstract
A mechanical microswitch has been fabricated by single crystal silicon bulk micromachining on a glass substrate. The mechanical part of the device has superior mechanical reliability and can be applied to a phased-array antenna, since the glass substrate can be easily extended to a large area, accommodating a large number of elements on it. A fabricated device was measured to have less than 0.2 dB of on-state insertion loss and higher than 13 dB of off-state isolation at 30 GHz.Keywords
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